Espoo, Finland

Timo Vähä-Ojala

This inventor holds 1 USPTO granted patent and 7 published patent applications. Top assignee: Picosun Oy. Active years: 2021.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Timo Vähä-Ojala. Retrieved from https://idiyas.com/inventor/timo-vähä-ojala

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 1 

% Patents Active = 100.0

Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 2(Granted Patents)


Company Filing History:


Years Active: 2021

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1 patent (USPTO):Explore Patents

Title: Timo Vähä-Ojala: Innovator in Thin-Film Deposition Technology

Introduction: Timo Vähä-Ojala is an inventive mind based in Espoo, Finland, who has made significant contributions to the field of thin-film deposition technology. With a focus on improving the uniformity of precursor distribution on substrates, his innovation stands out in the realm of advanced manufacturing processes.

Latest Patents: Timo Vähä-Ojala holds a patent titled "Fluid distributing device for a thin-film deposition apparatus." This invention relates to a thin-film deposition apparatus that features a reaction chamber designed to accommodate substrates arranged with their side faces adjacent to each other. The fluid distribution device includes an expansion region for precursor fluids to enter through multiple inlets, along with a transition region for effective mixing. Remarkably, from the transition region, fluid flow is directed into the reaction chamber in a strictly laminar manner, which notably improves the uniformity of precursor distribution on the substrates.

Career Highlights: Timo is currently employed at Picosun Oy, a company known for its leading-edge solutions in atomic layer deposition and thin-film technology. His work there emphasizes innovation and the development of efficient manufacturing processes that enhance product performance.

Collaborations: Timo has worked alongside notable colleagues such as Juhana Kostamo and Tom Blomberg. Their collaborative efforts contribute to advancing the field of thin-film deposition and fostering innovative solutions in technology.

Conclusion: Timo Vähä-Ojala exemplifies the spirit of innovation within the realm of thin-film deposition technology. His patent and ongoing work at Picosun Oy highlight the impact of research and collaboration in driving advancements in manufacturing processes. As technology evolves, the contributions of inventors like Timo are pivotal in shaping future developments in the industry.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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