Company Filing History:
Years Active: 2019-2021
Title: Tien-Zeng Fang: Innovator in Semiconductor Cleaning Technology
Introduction
Tien-Zeng Fang is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in cleaning technologies. With a total of three patents to his name, Fang's work is essential for enhancing the efficiency of photoresist process tools.
Latest Patents
One of Tien-Zeng Fang's latest patents is the "Cup wash disk with shims." This innovative device is designed for cleaning photoresist process tools. The cup wash disk features an upper plate arranged over a lower plate, creating a cavity between them. The lower plate includes peripheral openings that are in fluid communication with the cavity and are strategically placed along its periphery. A series of shims are positioned between the upper and lower plates, which serve to space them apart and create slits that are also in fluid communication with the cavity. This design allows for an effective method of cleaning the photoresist process tool.
Career Highlights
Fang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work at this prestigious company has allowed him to develop and refine his innovative cleaning technologies, contributing to the overall advancement of semiconductor manufacturing processes.
Collaborations
Throughout his career, Tien-Zeng Fang has collaborated with talented individuals such as Hua-Kuang Teng and Yu-Xiang Lin. These collaborations have fostered a creative environment that has led to the development of cutting-edge technologies in the semiconductor field.
Conclusion
In summary, Tien-Zeng Fang is a prominent inventor whose work in cleaning technologies for semiconductor manufacturing has made a significant impact. His innovative designs, particularly the cup wash disk with shims, demonstrate his commitment to advancing the industry. Fang's contributions continue to shape the future of semiconductor processes.