Tianming Chen

Title: Inventor Spotlight: Tianming Chen

Introduction

Tianming Chen is an innovative inventor based in San Jose, California. With a notable patent to his name, he has made significant contributions to the field of charged particle systems. His work focuses on enhancing the efficiency and functionality of inspection and grounding systems for masks used in these advanced technologies.

Latest Patents

Tianming holds a patent for a "System for inspecting and grounding a mask in a charged particle system." This innovative system involves a grounding component that features a base and an extension. The extension includes a conductive prong specifically designed to make contact with the conductive layer of a mask used in charged particle applications. His invention boasts several embodiments, including configurations with multiple conductive prongs that can contact various positions on the mask's conductive layer, thereby increasing the precision of the grounding process.

Career Highlights

Currently, Tianming is a key team member at ASML Netherlands B.V., an organization known for its cutting-edge technology in the semiconductor industry. His expertise in charged particle systems has contributed significantly to the company's advancements in mask inspection technology. With only one patent filed, his work demonstrates potential for further innovations in this critical area.

Collaborations

Throughout his career at ASML, Tianming has collaborated with esteemed colleagues such as Chiyan Kuan and Yixiang Wang. This teamwork fosters an environment of innovation, driving forward the development of practical solutions in complex technological challenges. Their combined efforts reinforce the importance of collaboration in achieving breakthroughs in technology.

Conclusion

Tianming Chen stands out as a dedicated inventor whose work in charged particle systems is paving the way for enhanced mask inspection methods. His contributions not only amplify the understanding and functionality of grounding systems but also hold promise for future advancements in related technologies. With continued collaboration and innovation, Tianming is poised to make further impactful contributions to the field.