This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Globalfoundries Inc.. Active years: 2013.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2013
Title: Thorsten Schepers: Semiconductor Processing Invention
Introduction
Thorsten Schepers is an inventor associated with Dresden, Germany. His patent work addresses monitoring ultraviolet (UV) irradiance during semiconductor processing.
Latest Patents
Schepers is credited with 1 patent: “UV Irradiance Monitoring in Semiconductor Processing Using a Temperature Dependent Signal.” The invention uses a temperature-dependent signal as a monitor for determining the momentary irradiance of a UV radiation source in a semiconductor process tool. This approach can support fast, reliable monitoring and control of UV irradiance.
Career Highlights
Schepers is associated with GlobalFoundries Inc. His patent reflects work on monitoring technology for UV-based semiconductor processing.
Collaborations
His coworker, Ulrich Mayer, is also associated with the patent.
Conclusion
Thorsten Schepers’s patent presents a temperature-dependent monitoring approach intended to improve the reliability and responsiveness of UV irradiance monitoring in semiconductor processing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile