The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Aug. 12, 2010
Applicants:
Ulrich Mayer, Dresden, DE;
Thorsten Schepers, Dresden, DE;
Inventors:
Ulrich Mayer, Dresden, DE;
Thorsten Schepers, Dresden, DE;
Assignee:
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a UV process tool for semiconductor processing, a temperature-dependent signal may be used as a monitor signal for determining the momentary irradiance of the UV radiation source. Consequently, a fast and reliable monitoring and/or controlling of the irradiance of UV process tools may be accomplished.
Quick Actions:
Mayer, Ulrich. (2013). Uv irradiance monitoring in semiconductor processing using a temperature dependent signal (U.S. Patent No. 8518720). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8518720
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