Company Filing History:
Years Active: 2006
Title: Thomas Stotts: Innovator in Chemical Mechanical Planarization
Introduction
Thomas Stotts is a notable inventor based in Chandler, AZ (US). He has made significant contributions to the field of chemical mechanical planarization (CMP), particularly through his innovative methods for controlling pressure zones in work piece carriers.
Latest Patents
Stotts holds a patent titled "Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarization." This patent outlines methods for managing adjustable pressure zones of a CMP carrier. The process involves determining the thickness of a layer on a wafer, removing a portion of that layer, and adjusting the pressure exerted by the carrier to achieve a target thickness profile. His work in this area has the potential to enhance the efficiency and effectiveness of CMP processes.
Career Highlights
Thomas Stotts is associated with Novellus Systems Incorporated, a company known for its advancements in semiconductor manufacturing technology. His role at Novellus has allowed him to apply his expertise in CMP and contribute to the development of innovative solutions in the industry.
Collaborations
Stotts has collaborated with notable colleagues, including Thomas Laursen and Justin M Quarantello. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Thomas Stotts is a distinguished inventor whose work in chemical mechanical planarization has made a significant impact on the semiconductor industry. His innovative methods and collaborations continue to drive advancements in this critical field.