Location History:
- Griggstown, NJ (US) (1981)
- Milltown, NJ (US) (1982)
- Belle Mead, NJ (US) (1981 - 1983)
- Branchville, NJ (US) (1983)
- Morris County, NJ (US) (1986)
- Mendham Township, Morris County, NJ (US) (1986)
Company Filing History:
Years Active: 1981-1986
Title: The Innovative Contributions of Thomas R Pampalone
Introduction
Thomas R Pampalone is a notable inventor based in Belle Mead, NJ (US), recognized for his significant contributions to the field of semiconductor technology. With a total of 15 patents to his name, Pampalone has made remarkable advancements that enhance the efficiency and effectiveness of optical lithography processes.
Latest Patents
Among his latest patents, Pampalone has developed an absorptive planarizing layer for optical lithography. This innovation utilizes o-cresol novolac resin, which serves as a superior planarizing material for large topographic features on semiconductor substrates. The resin not only oxidizes and darkens upon baking, providing excellent absorption capabilities for light wavelengths used in photoresist compositions, but it also transmits light at higher wavelengths. This feature is particularly useful for aligning pattern masks with alignment keys on a substrate, making it an invaluable tool in lithographic applications. Another significant patent is the two-layer negative resist, which markedly reduces the erosion rate of a layer of negative-working resist. By forming a thin layer of polyfunctional acrylate or methylacrylate monomer on the resist, the monomer insolubilizes at a faster rate upon irradiation, resulting in improved edge acuity and fewer pinholes in the developed resist pattern.
Career Highlights
Pampalone's career is marked by his work at RCA Inc., where he has been instrumental in driving innovation in semiconductor technologies. His expertise and dedication have led to the development of cutting-edge solutions that address the challenges faced in the industry.
Collaborations
Throughout his career, Pampalone has collaborated with talented individuals such as Kurt B Kilichowski and Ahmad H Khan. These partnerships have fostered a creative environment that has contributed to the successful development of his patents.
Conclusion
Thomas R Pampalone's contributions to the field of semiconductor technology through his innovative patents have significantly advanced optical lithography processes. His work continues to influence the industry and showcases the importance of innovation in technology.