Thomas R Baker

Title: Innovations of Thomas R Baker

Introduction

Thomas R Baker is a notable inventor based in Tempe, AZ (US), recognized for his contributions to the field of technology with a total of 3 patents. His work primarily focuses on advancements in sputter chambers and dielectric wafers, showcasing his expertise in materials and processes that enhance semiconductor manufacturing.

Latest Patents

One of Baker's latest patents is for a sputter chamber with an extended protection plate and method of use. This invention features a rotatably mounted cathode nested in spacers made from Teflon, along with a quartz plate that defines wafer receiving openings. This design prevents sputtering of the spacers and produces fluorine-containing ions in the chamber plasma, which can chemically etch masking materials like titanium tungsten. Another significant patent is for a planar dielectric isolated wafer, which utilizes a polysilicon filler to remove surface irregularities. This process not only creates a substantially planar surface but also enhances dielectric isolation during subsequent field oxide growth.

Career Highlights

Baker has made significant strides in his career while working at Motorola Corporation. His innovative approaches have contributed to the development of advanced technologies that are crucial in the semiconductor industry. His patents reflect a deep understanding of material science and engineering principles.

Collaborations

Throughout his career, Baker has collaborated with notable colleagues, including David A Shumate and George F Anderson. These partnerships have likely fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Thomas R Baker's contributions to technology through his patents and work at Motorola Corporation highlight his role as a significant inventor in the field. His innovative solutions continue to impact the semiconductor industry positively.