This inventor holds 1 USPTO granted patent. Top assignee: Lam Research Corporation. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Thomas McDaniel: Innovator in Plasma Processing Technology
Introduction
Thomas McDaniel is a notable inventor based in Wilsonville, OR (US). He has made significant contributions to the field of plasma processing tools, showcasing his expertise and innovative spirit. With a focus on enhancing substrate processing technology, McDaniel has developed a unique patent that addresses critical challenges in the industry.
Latest Patents
McDaniel holds a patent titled "Substrate state detection for plasma processing tools." This invention introduces a substrate processing tool capable of detecting a gap and/or shifting of a substrate clamped to a clamping surface in a processing chamber. The detection is based on the observed behavior of RF power delivered to the processing chamber during processing. By comparing the voltage-current phase angle difference and/or impedance magnitude change between a real RF power component and a reactive RF power component, the tool effectively monitors substrate conditions.
Career Highlights
Thomas McDaniel is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to apply his innovative ideas and contribute to advancements in plasma processing technology. With a patent portfolio that includes 1 patent, McDaniel continues to push the boundaries of what is possible in his field.
Collaborations
One of McDaniel's notable coworkers is Noah Elliot Baker. Their collaboration at Lam Research Corporation has fostered an environment of innovation and creativity, leading to advancements in substrate processing technologies.
Conclusion
In summary, Thomas McDaniel is a dedicated inventor whose work in plasma processing technology has made a significant impact. His innovative patent and contributions at Lam Research Corporation highlight his commitment to advancing the field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
