The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2026
Filed:
Oct. 16, 2019
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Noah Elliot Baker, West Linn, OR (US);
Thomas Mcdaniel, Wilsonville, OR (US);
Assignee:
LAM RESEARCH CORPORATION, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); H01J 37/32082 (2013.01); H01J 37/32926 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/24564 (2013.01); H01J 2237/24592 (2013.01);
Abstract
A substrate processing tool capable of detecting a gap and/or shifting of a substrate clamped to a clamping surface in a processing chamber based on observed behavior of RF power delivered to the processing chamber during processing. The behavior of the RF power is observed by comparing a voltage-current phase angle difference and/or impedance magnitude change between a real RF power component and a reactive RF power component of the RF power delivered to the processing chamber.