Company Filing History:
Years Active: 1995-1999
Title: Innovations by Thomas Joseph Banholzer
Introduction
Thomas Joseph Banholzer is a notable inventor based in San Jose, CA. He has made significant contributions to the field of substrate processing, holding a total of 5 patents. His work primarily focuses on enhancing the efficiency and effectiveness of wafer processing technologies.
Latest Patents
One of Banholzer's latest patents is for a clamp ring designed for a domed heated pedestal in wafer processing. This invention involves a substrate processing chamber that houses a domed pedestal for supporting a substrate. The clamp ring secures the substrate to the pedestal, ensuring precise placement during processing. The lift mechanism included in this design allows for the substrate to be moved into close proximity to the clamp ring, facilitating a smooth transfer.
Another significant patent is for a lid and door for a vacuum chamber, which includes replaceable parts such as an aluminum lid and a quartz door. These components are treated to enhance adhesion of materials deposited during substrate processing. The cleaning and roughening processes improve the performance of the vacuum chamber, thereby reducing equipment downtime.
Career Highlights
Banholzer is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display manufacturing industries. His innovative designs and patents have contributed to advancements in wafer processing technologies, showcasing his expertise and commitment to the field.
Collaborations
Throughout his career, Banholzer has collaborated with talented individuals such as Dan A Marohl and Avi Tepman. These collaborations have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Thomas Joseph Banholzer's contributions to the field of wafer processing through his patents and collaborations highlight his role as a significant inventor. His work continues to influence the industry, paving the way for future advancements in substrate processing technologies.