Thomas J Kloffenstein

Title: Innovations by Thomas J. Kloffenstein

Introduction

Thomas J. Kloffenstein is a notable inventor based in Morgan Hill, CA (US). He has made significant contributions to the field of semiconductor fabrication, holding a total of 4 patents. His work focuses on improving processes and formulations that enhance the efficiency and effectiveness of semiconductor manufacturing.

Latest Patents

Kloffenstein's latest patents include a "Post plasma ashing wafer cleaning formulation." This innovative formulation is designed for use in post plasma ashing semiconductor fabrication. It comprises at least one organic chelating agent and at least one polar solvent, which work together to effectively remove inorganic compound residue from semiconductor wafers. The chelating agents he utilizes include 2,4-Pentanedione, Malonic acid, Oxalic acid, p-Toluenesulfonic acid, and Trifluoroacetic acid. The polar solvents include Water, Ethylene glycol, N-Methylpyrrolidone (NMP), Gamma butyrolactone (BLO), Cyclohexylpyrrolidone (CHP), Sulfolane, 1,4-Butanediol, and Butyl carbitol.

Another significant patent is the "Real-time component monitoring and replenishment system for multicomponent fluids." This system allows for the monitoring and compositional control of multicomponent fluid compositions. It employs component analysis through titration or other analytical procedures to adjust the relative amounts of components in the fluid composition. This innovation is particularly useful in semiconductor manufacturing for photoresist and post-etch residue removal.

Career Highlights

Kloffenstein works at Advanced Technology Materials, Inc., where he continues to develop innovative solutions for the semiconductor industry. His expertise in formulating cleaning solutions and monitoring systems has positioned him as a key player in advancing semiconductor manufacturing technologies.

Collaborations

Throughout his career, Kloffenstein has collaborated with notable colleagues, including Russell Stevens and Todd Aycock. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Thomas J. Kloffenstein's contributions to semiconductor fabrication through his innovative patents and collaborative efforts highlight his significant role in the industry. His work continues to influence advancements in semiconductor manufacturing processes.