Company Filing History:
Years Active: 1999-2001
Title: Innovator Thomas J. Grebinski: Advancing Semiconductor Technology
Introduction: Thomas J. Grebinski, based in Boise, ID, is a notable inventor in the field of semiconductor manufacturing. With three patents to his name, Thomas has made significant contributions to enhancing the efficiency and effectiveness of techniques used in the production of semiconductor devices.
Latest Patents: Among his latest innovations, Thomas has developed two groundbreaking planarization compositions. The first patent focuses on a composition for chemical mechanical planarization of dielectric layers used in semiconductor manufacture. This innovative composition includes spherical silica particles of specific sizes and a carefully balanced liquid carrier, allowing for the efficient thinning, polishing, and planarizing of interlayer dielectric thin films. The pH of this composition ranges from 9 to 11.5, ensuring optimal performance with low amounts of metal ions.
The second patent provides a planarization composition aimed specifically at removing metal films. This embodiment features monodisperse spherical silica particles and a complex liquid carrier system that includes an amine hydroxide and an acid stabilizer, allowing for precise adjustment of pH levels. This advancement is essential for achieving high-quality results in semiconductor device manufacturing.
Career Highlights: Thomas is a key innovator at Advanced Technology Materials, Inc., where he has applied his expertise in semiconductor processes to develop advanced materials and methods. His patents reflect a strong commitment to innovation, positioning him as a leader in the field.
Collaborations: Throughout his career, Thomas has collaborated with esteemed colleagues such as James E. Currie and Michael Jones. These partnerships have fostered an environment of creativity and technological advancement, driving the development of new solutions in semiconductor manufacturing.
Conclusion: Thomas J. Grebinski's contributions to the semiconductor industry highlight the importance of innovation and collaboration in developing advanced manufacturing techniques. His work not only showcases his dedication to improving technology but also sets a benchmark for future inventors in the field.