Company Filing History:
Years Active: 2007
Title: The Innovative Contributions of Thomas Haensel
Introduction
Thomas Haensel, an accomplished inventor based in Naunhof, Germany, has made significant strides in the field of micro-lithography. With one patent to his name, he showcases a unique approach to substrate manufacturing that is essential for advanced technological applications.
Latest Patents
Haensel's notable patent is titled "Substrate for the micro-lithography and process of manufacturing thereof." This invention is centered on the creation of a substrate particularly well-suited for Extremer Ultraviolet (EUV) micro-lithography. The substrate consists of a base layer that features a low coefficient of thermal expansion (CTE), upon which at least one cover layer made of semiconductor material is applied. The innovative aspect of this invention lies in the use of a silicon cover layer, ideally deposited via ion beam sputtering. Furthermore, through an additional ion beam figuring treatment, substrates of remarkable shape accuracy and minimal roughness can be produced.
Career Highlights
Currently, Thomas Haensel is employed at Schott AG, a leading company in glass and glass-ceramics that plays an essential role in various industries, including microelectronics. His expertise and commitment to innovation have positioned him as a key player in the development of advanced materials that contribute to technological evolution.
Collaborations
Throughout his career, Haensel has collaborated with talented colleagues such as Lutz Aschke and Markus Schweizer. Their teamwork exemplifies the spirit of innovation, fostering an environment where groundbreaking ideas can flourish and be transformed into effective solutions in the field of micro-lithography.
Conclusion
In summary, Thomas Haensel is a remarkable inventor whose patent on substrates for EUV micro-lithography highlights his contributions to the industry. Through his work at Schott AG and collaboration with other skilled professionals, he continues to drive innovation and enhance the capabilities of modern technology.