Company Filing History:
2 out of 51,907 
1 out of 581 
Years Active: 2003-2008
Title: Thomas E Devan: Innovator in Wafer Processing Technology
Introduction
Thomas E Devan is a notable inventor based in Westlake, OH (US). He holds a total of 3 patents that showcase his contributions to the field of wafer processing technology. His innovative designs and methods have significantly impacted the industry.
Latest Patents
One of his latest patents is the "Wafer handling apparatus and method of manufacturing thereof." This invention involves a wafer processing device that includes a planar support platen and a support shaft with a centrally located bore. The device features electrical conductors that are strategically placed within the shaft. In one embodiment, the electrical leads consist of a pyrolytic graphite rod, separated by a pyrolytic boron nitride (pBN) coating. Another embodiment presents a unitary body of graphite for the support platen and shaft. Additionally, the connection posts are made from a carbon fiber composite, with protective ceramic paste applied to the electrical connectors for enhanced durability.
Another significant patent is the "Pyrolytic boron nitride crucible and method." This patent outlines a method for forming a pyrolytic boron nitride (PBN) article. The process involves introducing ammonia vapors and a gaseous boron halide into a heated furnace reactor to deposit boron nitride in layers on a substrate. The method includes injecting a gaseous dopant at controlled intervals to achieve specific doping concentrations within the layers.
Career Highlights
Throughout his career, Thomas E Devan has worked with prominent companies such as General Electric Company and Momentive Performance Materials GmbH. His experience in these organizations has contributed to his expertise in wafer processing technologies.
Collaborations
Some of his notable coworkers include Jeffrey Lennartz and Ajit Sane. Their collaboration has likely fostered innovative ideas and advancements in their respective fields.
Conclusion
Thomas E Devan's contributions to wafer processing technology through his patents and career experiences highlight his role as an influential inventor. His work continues to inspire advancements in the industry.