The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2008
Filed:
Jan. 16, 2004
John Thomas Mariner, Avon Lake, OH (US);
Timothy J. Hejl, Independence, OH (US);
Douglas Alan Longworth, Cleveland Heights, OH (US);
Jeffrey Lennartz, Cleveland, OH (US);
Ajit Sane, Medina, OH (US);
Andrew John Macey, Medina, OH (US);
Jon Leist, North Olmsted, OH (US);
Thomas E. Devan, Westlake, OH (US);
John Thomas Mariner, Avon Lake, OH (US);
Timothy J. Hejl, Independence, OH (US);
Douglas Alan Longworth, Cleveland Heights, OH (US);
Jeffrey Lennartz, Cleveland, OH (US);
Ajit Sane, Medina, OH (US);
Andrew John Macey, Medina, OH (US);
Jon Leist, North Olmsted, OH (US);
Thomas E. Devan, Westlake, OH (US);
Momentive Performance Materials Inc., Wilton, CT (US);
Abstract
A wafer processing device or apparatus, i.e., a heater or an electrostatic chuck, comprises a planar support platen, a support shaft having centrally located bore, and a pair of electrical conductors located in the shaft. In one embodiment, the electrical conductors are concentrically located within the bore of the shaft, with the first electrical lead being in the form of a pyrolytic graphite rod and separated from the outer second graphite electrical lead by means of a pyrolytic boron nitride (pBN) coating. In a second embodiment, the support platen and the support shaft are formed from a single unitary body of graphite. In yet another embodiment of the device of the invention, the connection posts comprise a carbon fiber composite and the exposed ends of the electrical connectors are coated with a protective ceramic paste for extended life in operations.