Company Filing History:
Years Active: 2008
Title: Andrew John Macey: Innovator in Wafer Processing Technology
Introduction
Andrew John Macey is a notable inventor based in Medina, OH (US). He has made significant contributions to the field of wafer processing technology. His innovative approach has led to the development of a unique patent that enhances the efficiency and effectiveness of wafer handling.
Latest Patents
Macey holds a patent for a "Wafer handling apparatus and method of manufacturing thereof." This invention involves a wafer processing device, such as a heater or an electrostatic chuck. The device comprises a planar support platen, a support shaft with a centrally located bore, and a pair of electrical conductors situated within the shaft. In one embodiment, the electrical conductors are concentrically located within the bore of the shaft, with the first electrical lead being a pyrolytic graphite rod, separated from the outer second graphite electrical lead by a pyrolytic boron nitride (pBN) coating. Another embodiment features the support platen and support shaft formed from a single unitary body of graphite. Additionally, the device includes connection posts made from a carbon fiber composite, with the exposed ends of the electrical connectors coated with a protective ceramic paste for extended operational life.
Career Highlights
Macey is currently associated with Momentive Performance Materials GmbH, where he applies his expertise in materials science and engineering. His work focuses on advancing technologies that improve wafer processing and handling.
Collaborations
Throughout his career, Macey has collaborated with talented professionals, including John T. Mariner and Timothy J. Hejl. These collaborations have fostered innovation and contributed to the development of cutting-edge technologies in the industry.
Conclusion
Andrew John Macey is a distinguished inventor whose work in wafer processing technology has made a significant impact. His patent reflects his commitment to innovation and excellence in the field.
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