Theodore A Shankoff

Title: The Innovations of Theodore A. Shankoff

Introduction

Theodore A. Shankoff is a notable inventor based in Mendham, NJ (US). He has made significant contributions to the field of semiconductor technology, holding 2 patents that address critical challenges in integrated circuit processing.

Latest Patents

One of his latest patents focuses on resist adhesion in integrated circuit processing. The problem of reliably adhering resists to underlying surfaces, such as phosphorus-doped silicon dioxide or silicon nitride, is particularly challenging. Standard adhesion promoters like HMDS provide only marginal relief. By baking a relatively thin layer of resist on the underlying layer, a strong bond is achieved. Subsequently, a thicker layer of resist is applied and patterned in a standard manner, resulting in an excellent bond between the two layers. This innovation ensures that the bonded interfaces remain intact during subsequent processing.

Another significant patent by Shankoff involves the fabrication of semiconductor devices with planar recessed oxide. In this process, the formation of undesired 'bird's head' and 'bird's beak' is avoided by reducing the rate of oxide growth from the sidewalls of isotropically etched recesses while oxide is being grown from the bottoms of the recess regions. A silicon nitride mask, selectively formed on each sidewall, reduces the rate of oxide growth, leading to substantially planar surfaces after the termination of the oxide growth.

Career Highlights

Shankoff has had a distinguished career at Bell Telephone Laboratories, where he has been instrumental in advancing semiconductor technologies. His work has had a lasting impact on the industry, particularly in the areas of integrated circuit design and fabrication.

Collaborations

Throughout his career, Shankoff has collaborated with notable figures in the field, including his coworker Dawon Kahng. Their joint efforts have contributed to significant advancements in semiconductor technology.

Conclusion

Theodore A. Shankoff's innovations in semiconductor processing have paved the way for improved manufacturing techniques in the industry. His patents reflect a deep understanding of the challenges faced in integrated circuit fabrication and offer practical solutions that continue to influence the field.