The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 1981
Filed:
Mar. 10, 1980
Dawon Kahng, Bridgewater Township, Somerset County, NJ (US);
Theodore A Shankoff, Mendham, NJ (US);
Bell Telephone Laboratories, Incorporated, Murray Hill, NJ (US);
Abstract
In the fabrication of semiconductor integrated circuits which include recessed oxide isolation regions (29), formation of the undesired 'bird's head' and 'bird's beak' is avoided by reducing the rate of oxide growth from the sidewalls of isotropically etched recesses (22) while oxide is being grown from the bottoms of the recess regions. A silicon nitride mask (24) formed selectively on each of the sidewalls which has previously been coated with a thin silicon dioxide layer (23) reduces the rate of oxide growth therefrom, so that the oxidized recess regions have substantially planar surfaces after termination of the oxide growth.