Kawasaki, Japan

Tetsuya Shirasu


Average Co-Inventor Count = 1.6

ph-index = 2

Forward Citations = 6(Granted Patents)


Company Filing History:


Years Active: 2007-2015

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6 patents (USPTO):Explore Patents

Title: Tetsuya Shirasu: Innovator in Semiconductor Technology

Introduction

Tetsuya Shirasu is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His innovative methods have advanced the fabrication processes of semiconductor devices, showcasing his expertise and dedication to the industry.

Latest Patents

Shirasu's latest patents include a method for fabricating semiconductor devices. This method involves several steps: depositing an insulating film on a semiconductor substrate, forming a recess in the insulating film, depositing a conductive film while filling the recess, and polishing the conductive film. The polishing step is particularly noteworthy as it includes two substeps using different polisher pads conditioned with distinct dressers. Another significant patent focuses on a method for manufacturing semiconductor devices, which includes depositing an interconnect material over an insulating film and polishing it using a controlled polishing liquid. The oxidation-reduction potential of the polishing liquid is carefully managed to ensure optimal results.

Career Highlights

Throughout his career, Tetsuya Shirasu has worked with notable companies such as Fujitsu Corporation and Fujitsu Semiconductor Limited. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.

Collaborations

Shirasu has collaborated with esteemed colleagues, including Toshiyuki Karasawa and Nobuhiro Misawa. These partnerships have fostered an environment of innovation and have led to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Tetsuya Shirasu's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence the advancement of semiconductor fabrication methods, ensuring that he remains a significant figure in this vital field.

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