Koshi, Japan

Tetsuya Sakazaki


Average Co-Inventor Count = 2.9

ph-index = 1

Forward Citations = 2(Granted Patents)


Location History:

  • Nirasaki, JP (2015)
  • Kumamoto, JP (2023)
  • Koshi, JP (2022 - 2024)

Company Filing History:


Years Active: 2015-2025

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6 patents (USPTO):

Title: Tetsuya Sakazaki: Innovator in Substrate Processing Technologies

Introduction

Tetsuya Sakazaki is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing, holding a total of six patents. His innovative work focuses on methods and devices that enhance the efficiency and effectiveness of substrate processing in various applications.

Latest Patents

Sakazaki's latest patents include a substrate processing apparatus and method, as well as a chemical liquid designed for substrate processing. One of his notable methods involves supplying a first processing liquid containing a chelating agent and a solvent to a substrate with a metal film. This process generates a complex that includes the metal and the chelating agent while the substrate is rotated. Following this, a second processing liquid containing water is supplied to dissolve the complex. Additionally, he has developed a substrate processing method that utilizes an etching liquid containing an etching agent and a protection agent. This etching liquid is specifically designed to etch a metal-based material while protecting a silicon-based material from damage.

Career Highlights

Tetsuya Sakazaki is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at Tokyo Electron has allowed him to apply his innovative ideas in practical settings, contributing to advancements in substrate processing technologies.

Collaborations

Sakazaki collaborates with several talented individuals in his field, including Kenji Sekiguchi and Hitoshi Kosugi. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies.

Conclusion

Tetsuya Sakazaki's contributions to substrate processing technologies through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the industry. His advancements continue to influence the field and pave the way for future innovations.

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