Company Filing History:
Years Active: 2019-2025
Title: Tetsuro Itoyama: Innovator in Electrostatic Chuck Technology
Introduction
Tetsuro Itoyama is a prominent inventor based in Kitakyushu, Japan. He has made significant contributions to the field of electrostatic chuck technology, holding a total of 6 patents. His innovative designs have advanced the efficiency and functionality of electrostatic chucks used in various applications.
Latest Patents
Among his latest patents, Tetsuro Itoyama has developed an electrostatic chuck that features a ceramic dielectric substrate, a base plate, a heater part, and a bypass part. This design includes a substrate upper surface and a substrate lower surface, with the heater part positioned between them. The heater part consists of at least one heater layer, ensuring effective thermal management. Additionally, the bypass part is designed with a first bypass portion that is strategically placed lower than the substrate lower surface, enhancing the overall performance of the chuck.
Another notable patent involves an electrostatic chuck that incorporates a base plate, a first heater element, and multiple first power feeding terminals. This design features a spiral-shaped communicating path and a plurality of first zones within the heater element. Each zone is equipped with a first heater line and power feeding portions that are electrically connected to the power feeding terminals, optimizing the distribution of power across the chuck.
Career Highlights
Tetsuro Itoyama is currently employed at Toto Ltd., a company known for its innovative products in the sanitary ware industry. His work at Toto Ltd. has allowed him to focus on developing cutting-edge technologies that enhance product performance and user experience.
Collaborations
Throughout his career, Tetsuro has collaborated with talented individuals such as Jumpei Uefuji and Masafumi Ikeguchi. These collaborations have fostered a creative environment that has led to the successful development of various patents and innovations.
Conclusion
Tetsuro Itoyama's contributions to electrostatic chuck technology exemplify his dedication to innovation and excellence. His patents reflect a deep understanding of engineering principles and a commitment to advancing technology in his field.