Tetsu Zenko

Title: Tetsu Zenko: Innovator in Film Forming Technology

Introduction

Tetsu Zenko is a notable inventor based in Nirasaki, Japan. He has made significant contributions to the field of film forming technology, particularly in the development of methods for creating metal-containing nitride films.

Latest Patents

Zenko holds a patent for a "Film forming method and film forming apparatus." This innovative method involves supplying a metal-containing gas, a silicon-containing gas, and a nitrogen-containing gas into a processing container where a substrate is accommodated. The process is characterized by a series of steps where the metal-containing gas and silicon-containing gas are supplied multiple times before introducing the nitrogen-containing gas, enhancing the efficiency of film formation.

Career Highlights

Tetsu Zenko is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work has contributed to advancements in film forming technologies that are crucial for various applications in electronics.

Collaborations

Zenko has collaborated with talented coworkers such as Taichi Monden and Kazuki Ota, further enriching the innovative environment at Tokyo Electron Limited.

Conclusion

Tetsu Zenko's contributions to film forming technology exemplify the impact of dedicated inventors in advancing industrial processes. His patent reflects a commitment to innovation that continues to influence the field.