Terry A Trumbly

Title: Innovations of Terry A Trumbly

Introduction

Terry A Trumbly is an accomplished inventor based in Pleasant Hill, CA (US). He holds a total of 4 patents that showcase his contributions to the field of magnetron technology. His work focuses on improving the uniformity of film deposition processes, which is crucial in various industrial applications.

Latest Patents

One of his latest patents involves the use of multiple anodes in a magnetron to enhance the uniformity of plasma density profiles. In this innovation, two or more small anodes are strategically spaced apart, allowing for individual control of their electrical power. This design significantly improves the rate of deposition across substrates while minimizing adverse effects when sputtering dielectric materials. Another notable patent is for a planar magnetron sputtering apparatus that features improved target utilization and cooling capacity. This device incorporates a magnet yoke made of low carbon steel, which provides both magnetic shunt and physical strength. The design includes an outer annular magnet surrounding an inner elongated magnet, optimizing the magnetic field and enhancing the uniformity of film deposition.

Career Highlights

Throughout his career, Terry has worked with notable companies such as Airco, Inc. and The BOC Group, Inc. His experience in these organizations has contributed to his expertise in magnetron technology and film deposition processes.

Collaborations

Terry has collaborated with several professionals in his field, including Peter A Sieck and Albany D Grubb. These partnerships have likely enriched his work and led to further advancements in his inventions.

Conclusion

Terry A Trumbly's innovative patents and career achievements highlight his significant contributions to the field of magnetron technology. His work continues to influence the industry and improve film deposition processes.