Terry A Tabler

Title: Innovations by Terry A. Tabler

Introduction

Terry A. Tabler is a notable inventor based in Sandy Hook, CT (US). He has made significant contributions to the field of semiconductor manufacturing through his innovative designs and systems. With a total of 3 patents, his work has had a considerable impact on the industry.

Latest Patents

One of Terry's latest patents is a fluid distribution system and process, specifically designed for supplying gas to semiconductor manufacturing facilities. This system includes a main fluid supply vessel that is connected by flow circuitry to a local sorbent-containing supply vessel. From this vessel, low-pressure compressed gas is dispensed to a fluid-consuming unit, such as a semiconductor manufacturing tool. A fluid pressure regulator is integrated into the flow circuitry or the main liquid supply vessel to ensure that the gas delivered to the fluid-consuming unit is at the desired pressure. This system is particularly effective for the supply and utilization of liquefied compressed gases, including trimethylsilane, arsine, phosphine, and dichlorosilane.

Career Highlights

Terry A. Tabler is associated with Advanced Technology Materials, Inc., where he has been instrumental in developing advanced technologies for the semiconductor industry. His expertise in fluid distribution systems has positioned him as a key player in enhancing manufacturing processes.

Collaborations

Throughout his career, Terry has collaborated with notable colleagues, including Luping Wang and James A. Dietz. These partnerships have fostered innovation and contributed to the successful development of new technologies in the field.

Conclusion

Terry A. Tabler's contributions to the semiconductor industry through his innovative patents and collaborative efforts highlight his importance as an inventor. His work continues to influence advancements in manufacturing processes, showcasing the vital role of innovation in technology.