Advanced Technology Materials, Inc.

Terry A Tabler

Luping Wang

James A Dietz

Steven M Lurcott

A fluid distribution system for supplying a gas to a process facility such as a semiconductor manufacturing plant. The system includes a main fluid supply vessel coupled by flow circuitry to a local sorbent-containing supply vessel from which fluid, e.g., low pressure compressed gas, is dispensed to a fluid-consuming unit, e.g., a semiconductor manufacturing tool. A fluid pressure regulator is disposed in the flow circuitry or the main liquid supply vessel and ensures that the gas flowed to the fluid-consuming unit is at desired pressure. The system and associated method are particularly suited to the supply and utilization of liquefied compressed gases such as trimethylsilane, arsine, phosphine, and dichlorosilane.

Fluid distribution system and process, and semiconductor fabrication facility utilizing same

A leak detection device securable in detection proximity to a fluid vessel. The leak detection device includes a sensor element and a monitoring assembly. The sensor element has a monitorable characteristic, and the monitorable characteristic changes upon contact, immerson or in exposure to the fluid contained in the vessel. The monotoring assembly is responsive to the monitorable characteristic and produces an changing electrical output in response to change in the monitorable characteristic. The vessel and leak detection device may form an assembly including a shroud or cover over the detection device and a leak-susceptible portion of the vessel, to provide a microenvironment in which the detection device is operated.

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Sandy Hook, CT, United States of America

Terry A Tabler