This inventor holds 1 USPTO granted patent. Top assignee: Axcelis Technologies, Inc.. Active years: 2013.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2013
Title: Innovations of Teng Chao D Tao in Electrostatic Clamping Technology
Introduction
Teng Chao D Tao is an accomplished inventor based in Saugus, MA (US). He has made significant contributions to the field of electrostatic clamping technology. With a focus on enhancing the efficiency and effectiveness of workpiece clamping systems, his innovations have garnered attention in the industry.
Latest Patents
Teng Chao D Tao holds a patent for an "Annulus clamping and backside gas cooled electrostatic chuck." This invention provides a system and method for clamping a workpiece using an electrostatic clamp (ESC). The design features a clamping plate with a central disk and an annulus that encircles it. The central disk is recessed from the annulus, creating a defined volume. Backside gas delivery apertures are strategically positioned near the interface between the annulus and the central disk. The system utilizes a first voltage to clamp the peripheral region of the workpiece and a second voltage to compensate for the pressure of the backside gas within the volume. The ESC can be constructed from J-R- or Coulombic-type materials, and it includes a cooling plate with channels for routing cooling fluid.
Career Highlights
Teng Chao D Tao is currently employed at Axcelis Technologies, Inc., where he continues to innovate in the field of electrostatic clamping. His work has contributed to advancements in semiconductor manufacturing processes, enhancing the precision and reliability of workpiece handling.
Collaborations
Throughout his career, Teng Chao D Tao has collaborated with notable colleagues, including William Davis Lee and Marvin Raymond LaFontaine. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Teng Chao D Tao's contributions to electrostatic clamping technology exemplify the impact of innovative thinking in the field. His patent for the annulus clamping and backside gas cooled electrostatic chuck showcases his commitment to advancing manufacturing processes. Through his work at Axcelis Technologies, Inc., he continues to push the boundaries of technology and improve industry standards.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile