Teiichi Kimura

Title: Teiichi Kimura: Pioneering Innovations in Dry Etching and Sputtering Technologies

Introduction

Teiichi Kimura is a notable inventor hailing from Itami, Japan. With an impressive portfolio of three patents, Kimura has made significant contributions to the fields of dry etching and sputtering apparatus technologies. His advancements have implications for various applications in semiconductor manufacturing and material science.

Latest Patents

Kimura's latest patents demonstrate his innovative approach to processing technologies. One of his key inventions is a dry etching method wherein the etching process is closely monitored. This method involves determining the layer being processed on a substrate with a multi-layer film. By adding CHF gas during the etching of the lowermost layer until the completion of the process, Kimura enhances the precision and efficiency of dry etching operations.

Additionally, Kimura has developed a sputtering apparatus designed for optimal film deposition. This apparatus features a vacuum chamber equipped with both gas supply and discharge functionalities. The innovative design includes a substrate held in a fixed state relative to the target electrode, which is divided into three or more parts. Each divided target is accompanied by a magnet positioned to generate a magnetic force on its surface, facilitating enhanced sputtering processes.

Career Highlights

Teiichi Kimura's career is marked by his tenure at Matsushita Electric Industrial Co., Ltd., where he has played a crucial role in the advancement of technology in his domain. His expertise and innovative thinking have contributed to the company's reputation as a leader in electronic and semiconductor technologies.

Collaborations

Throughout his career, Kimura has collaborated with prominent colleagues, including Isamu Aokura and Munekazu Nishihara. Their collective efforts have fostered a creative environment that encourages groundbreaking research and development in the field of materials engineering.

Conclusion

In summary, Teiichi Kimura is an accomplished inventor whose contributions in dry etching and sputtering technologies have made a lasting impact in the industry. His dedication to innovation at Matsushita Electric Industrial Co., Ltd. and his collaborative spirit with coworkers continue to inspire advancements in semiconductor manufacturing processes.