Tao Zhang

Title: Innovations and Contributions of Inventor Tao Zhang

Introduction

Tao Zhang is a prominent inventor based in San Ramon, California, known for his significant contributions to the field of electronic device manufacturing. With a remarkable portfolio of 15 patents, he has made strides in enhancing plasma generation and process chamber parameters.

Latest Patents

One of his latest patents focuses on "Plasma generation quality monitoring using multi-channel sensor data." This method involves obtaining measurements from a calibrated feedback control device within a process chamber. It determines the performance of a plasma generating apparatus based on these measurements and sensor data. The process culminates in a combined indication of performance, which informs corrective actions to optimize the apparatus's functionality.

Another notable patent is titled "Methods and mechanisms for adjusting process chamber parameters during substrate manufacturing." This innovation allows for the collection of metrology data during a deposition process on a substrate. The system generates a correction profile based on this data, leading to an updated process recipe that enhances the etching process on the substrate.

Career Highlights

Tao Zhang has worked with leading companies in the industry, including Applied Materials, Inc. and Lam Research Corporation. His experience in these organizations has contributed to his expertise in electronic device manufacturing and innovation.

Collaborations

Throughout his career, Tao has collaborated with notable professionals such as Eric A Pape and Upendra V Ummethala. These collaborations have further enriched his work and contributions to the field.

Conclusion

Tao Zhang's innovative patents and career achievements highlight his significant role in advancing electronic device manufacturing. His work continues to influence the industry and pave the way for future innovations.