Tao Yi Fu

Title: Innovations of Tao Yi Fu in Optical Inspection Systems

Introduction

Tao Yi Fu is a notable inventor based in Fremont, California, recognized for his contributions to optical inspection systems. He has developed innovative technologies that enhance the efficiency and accuracy of wafer inspection processes. His work is particularly significant in the field of semiconductor manufacturing.

Latest Patents

Tao Yi Fu holds a patent for a "High throughput brightfield/darkfield water inspection system using advanced optical techniques." This advanced system utilizes broadband brightfield illumination information through a defect detector, which triggers darkfield illumination when necessary. The defect detector creates a two-dimensional histogram of defect data, and a dual-mode defect decision algorithm assesses these defects. The system employs adjustable height laser beams to illuminate the wafer surface at specific angles, ensuring precise defect detection.

Career Highlights

Tao Yi Fu is associated with Kla Tencor Corporation, a leading company in the field of semiconductor inspection and metrology. His innovative approach to optical techniques has contributed to the advancement of inspection systems, making them more effective in identifying defects in semiconductor wafers.

Collaborations

Tao Yi Fu has collaborated with notable colleagues, including Christopher R Fairley and Gershon Perelman. These collaborations have fostered a productive environment for innovation and development in optical inspection technologies.

Conclusion

Tao Yi Fu's contributions to the field of optical inspection systems demonstrate his commitment to advancing technology in semiconductor manufacturing. His innovative patent reflects a significant step forward in improving defect detection processes.