This inventor holds 2 USPTO granted patents. Top assignee: Ngk Insulators, Inc.. Active years: 2018-2022.
Location History:
- Handa, JP (2018)
- San Jose, CA (US) (2022)
Company Filing History:
Years Active: 2018-2022
Title: Takuya Yanoh: Innovator in Wafer Technology
Introduction
Takuya Yanoh is a prominent inventor based in Handa, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the design of wafer holding systems. With a total of 2 patents, Yanoh's work is recognized for its innovative approaches to improving wafer handling and processing.
Latest Patents
Yanoh's latest patents include a "Wafer Holding Table" and a "Wafer Holder and Method for Manufacturing the Same." The wafer holding table features a ceramic electrostatic chuck, a metal cooling plate, a resin layer with predetermined thermal resistance, and a stress relaxation layer. This design ensures optimal thermal management and structural integrity during wafer processing. The wafer holder patent describes a resin adhesive layer that enhances the connection between the electrostatic chuck and the cooling plate, with specific layers designed for heat resistance and flexibility.
Career Highlights
Takuya Yanoh is currently employed at NGK Insulators, Inc., where he continues to develop innovative solutions for the semiconductor industry. His work has been instrumental in advancing the technology used in wafer handling, which is critical for the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Yanoh collaborates with notable colleagues, including Kengo Torii and Kazuma Ohba. Their combined expertise contributes to the innovative projects at NGK Insulators, Inc., fostering a collaborative environment that drives technological advancements.
Conclusion
Takuya Yanoh's contributions to wafer technology exemplify the importance of innovation in the semiconductor industry. His patents reflect a commitment to enhancing the efficiency and effectiveness of wafer handling systems. Through his work, Yanoh continues to influence the future of semiconductor manufacturing.