Takuya Miura

Title: Takuya Miura: Innovator in Liquid Processing Technology

Introduction

Takuya Miura is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of liquid processing technology. His innovative work has led to the development of a unique liquid processing apparatus that enhances the efficiency of substrate treatment.

Latest Patents

Takuya Miura holds 1 patent for his invention titled "Liquid processing apparatus, liquid processing method, and computer-readable recording medium." This patent describes a liquid processing apparatus that includes a substrate holder, a processing liquid supply, a gas supply, and a controller. The gas supply features a diffusion nozzle with multiple discharge openings, each elongated at different angles. This design allows for precise control of gas jets onto the substrate's surface, particularly in areas where processing liquid is applied.

Career Highlights

Takuya Miura is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has been instrumental in advancing liquid processing technologies. His innovative approach has positioned him as a key figure in the development of efficient processing methods.

Collaborations

Takuya Miura has collaborated with notable colleagues, including Shougo Takahashi and Kouichirou Tanaka. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Takuya Miura's contributions to liquid processing technology exemplify the impact of innovation in the field. His patent and work at Tokyo Electron Limited highlight his role as a significant inventor in the industry.