Company Filing History:
Years Active: 2020-2025
Title: Takumi Kabe: Innovator in Plasma Processing Technology
Introduction
Takumi Kabe is a notable inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of plasma processing apparatuses and methods.
Latest Patents
Kabe's latest patents include a plasma processing apparatus and a plasma processing method. The plasma processing apparatus is designed to perform plasma processing on the end part of a substrate. It features a processing container, a substrate supporting member that applies high-frequency power, and a gas supply for generating plasma. Additionally, the apparatus includes a side ground electrode that maintains a ground potential, ensuring effective processing of the substrate.
Another significant patent is a gas distribution device and processing apparatus. This device consists of multiple supply lines connected to various processing chambers. It includes a branch unit for distributing gas from a supply source and a variation suppression unit that stabilizes flow rates of the gas across the supply lines. These innovations are crucial for improving the reliability and performance of plasma processing systems.
Career Highlights
Takumi Kabe is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to develop cutting-edge technologies that are widely used in the industry.
Collaborations
Kabe collaborates with talented coworkers, including Eiki Kamata and Taro Ikeda. Their combined expertise contributes to the advancement of plasma processing technologies and the overall success of their projects.
Conclusion
Takumi Kabe's contributions to plasma processing technology through his innovative patents and work at Tokyo Electron Limited highlight his importance in the field. His inventions continue to influence the industry and pave the way for future advancements.