Location History:
- Kanagawa, JP (2004)
- Tokyo, JP (2002 - 2011)
Company Filing History:
Years Active: 2002-2011
Title: Takuji Hayama: Innovator in Semiconductor Polishing Technology
Introduction
Takuji Hayama is a prominent inventor based in Tokyo, Japan. With a remarkable portfolio of 10 patents, Hayama has made significant contributions to the field of semiconductor manufacturing. His innovative approaches to polishing apparatuses have revolutionized the process of achieving flat mirror finishes on workpieces.
Latest Patents
Among his latest innovations, Hayama has developed two notable polishing apparatuses. The first patent details a polishing apparatus equipped with a top ring designed to hold a semiconductor wafer on a substrate holding surface. It includes a pusher mechanism that delivers the semiconductor wafer to the top ring and retrieves it as needed. The pusher features a push stage with a substrate placement surface and an air cylinder for vertical movement, along with a high-pressure fluid port that ejects fluid toward the semiconductor wafer to enhance polishing performance.
The second patent elaborates on a similar polishing apparatus that focuses on achieving a flat mirror finish for workpieces like semiconductor wafers. This version comprises a turntable with a polishing surface, a top ring for securing and pressing the workpiece, and at least three cleaning apparatuses for cleaning polished items. It also includes a transfer structure and a rotary transporter designed for efficient handling of polished workpieces.
Career Highlights
Takuji Hayama is currently associated with Ebara Corporation, a company renowned for its technological advancements in various sectors including semiconductor manufacturing. His expertise in polishing apparatus design underscores the critical nature of precision in semiconductor fabrication processes.
Collaborations
Throughout his career, Hayama has worked alongside esteemed colleagues such as Kunihiko Sakurai and Tetsuji Togawa. Their collaborations have fostered innovative solutions and advancements in polishing technologies, contributing to improved manufacturing efficiencies in the semiconductor industry.
Conclusion
Takuji Hayama stands out as a key figure in semiconductor innovation, particularly in the realm of polishing apparatuses. His 10 patents showcase his dedication to advancing technology and improving manufacturing processes. As the semiconductor industry continues to evolve, the impact of his inventions will likely be felt for years to come.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.