Company Filing History:
Years Active: 2005-2007
Title: Taketora Shinogi: Innovator in Developing Methods and Apparatus
Introduction
Taketora Shinogi is a notable inventor based in Kumamoto-ken, Japan. He has made significant contributions to the field of developing methods and apparatus, holding a total of 3 patents. His work focuses on enhancing the uniformity and efficiency of developing processes in various applications.
Latest Patents
One of Taketora Shinogi's latest patents involves a developing method and apparatus that utilizes a concentration measuring unit. This unit picks part of the developing fluid in a blending tank to measure the resist concentration through absorption photometry. The detected resist concentration is then fed to a control unit, which manages the respective valves of a TMAH concentrate solution, a solvent pipe, and a drain pipe. This ensures that the developing fluid in the blending tank maintains a TMAH concentration that corresponds to the measured resist-concentration value, achieving a constant developing rate. The developing fluid is then transferred from the blending tank to a supply tank and fed to a developer nozzle in the developing section through a developer pipe, driven by a pump. This innovative approach guarantees uniformity in development, even when the developing fluid is reused multiple times.
Career Highlights
Taketora Shinogi is currently employed at Tokyo Electron Limited, where he continues to advance his research and development efforts. His work has been instrumental in improving the processes used in the semiconductor industry, particularly in the area of photolithography.
Collaborations
Some of his notable coworkers include Kiyohisa Tateyama and Masafumi Nomura, who have collaborated with him on various projects within the company.
Conclusion
Taketora Shinogi's contributions to the field of developing methods and apparatus highlight his innovative spirit and dedication to enhancing technological processes. His patents reflect a commitment to achieving uniformity and efficiency in development, making him a valuable asset in the industry.