This inventor holds 4 USPTO granted patents. Top assignees: Nippon Kogaku K.k., Nikon Corporation. Active years: 1988-1990.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1988-1990
Title: The Innovations of Takeshi Suto
Introduction
Takeshi Suto is a notable inventor based in Funabashi, Japan. He has made significant contributions to the field of optical systems and sensors, holding a total of 4 patents. His work has been instrumental in advancing technologies that enhance precision and efficiency in various applications.
Latest Patents
One of Suto's latest patents is a projection exposure apparatus. This apparatus is equipped with an illuminating optical system designed to illuminate a reticle with a fine pattern. It features a projection optical system that projects the reticle's pattern onto a wafer. Additionally, it includes diaphragm means that can vary the aperture of the projection optical system's diaphragm. This innovation allows for the elimination of high-order diffracted light generated by the reticle's pattern, enhancing the quality of the projection.
Another significant patent is the surface displacement sensor with opening angle control. This sensor is designed with a stop or aperture that controls the angle of opening at the pupil of a detection optical system. It focuses a slit image on the surface to be detected, collecting light rays reflected from that surface. By limiting the angle of opening in the widthwise direction of the slit, the sensor improves detection accuracy. This design facilitates focal point adjustments, making the sensor more effective in its operations.
Career Highlights
Throughout his career, Takeshi Suto has worked with prominent companies such as Nippon Kogaku K.K. and Nikon Corporation. His experience in these organizations has contributed to his expertise in optical technologies and sensor design.
Collaborations
Suto has collaborated with notable individuals in his field, including Kyoichi Suwa and Kazuo Ushida. These partnerships have likely fostered innovation and the exchange of ideas, further enhancing his contributions to technology.
Conclusion
Takeshi Suto's work exemplifies the spirit of innovation in optical systems and sensors. His patents reflect a commitment to improving technology and enhancing precision in various applications. His contributions continue to influence the field and inspire future advancements.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile