Hyogo, Japan

Takeshi Kuroda


 

Average Co-Inventor Count = 3.7

ph-index = 4

Forward Citations = 78(Granted Patents)


Company Filing History:


Years Active: 1998-2000

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5 patents (USPTO):Explore Patents

Title: The Innovations of Takeshi Kuroda

Introduction

Takeshi Kuroda is a notable inventor based in Hyogo, Japan. He has made significant contributions to the field of semiconductor processing, holding a total of five patents. His work focuses on improving the efficiency and effectiveness of drying processes for semiconductor wafers.

Latest Patents

One of Kuroda's latest patents is a drying apparatus and method using isopropyl alcohol (IPA) for semiconductor wafers. This innovative method involves feeding IPA to a nozzle, creating a film-shaped flow that descends along the inner surface of a processing vessel. The design ensures that the IPA vapor does not condense unnecessarily on the vessel's walls, allowing for effective condensation on the surface of the object being processed. This advancement helps prevent defective dryness of the semiconductor wafers. Another patent describes a drying apparatus that features a nozzle and an exhaust member positioned opposite each other. The inwardly curved side wall of the processing vessel allows the nitrogen gas jet to function effectively as a curtain, eliminating the need for a cooling coil. This design reduces instability in the IPA vapor state, further enhancing the drying process.

Career Highlights

Kuroda has worked with prominent companies in the semiconductor industry, including Mitsubishi Electric Corporation and Ryoden Semiconductor System Engineering Corporation. His experience in these organizations has contributed to his expertise in developing innovative drying solutions for semiconductor manufacturing.

Collaborations

Kuroda has collaborated with several professionals in his field, including Akinori Matsumoto and Cozy Ban. These partnerships have likely fostered a creative environment that encourages innovation and the development of new technologies.

Conclusion

Takeshi Kuroda's contributions to semiconductor processing through his patents demonstrate his commitment to innovation in the field. His work continues to influence the efficiency of drying methods, showcasing the importance of advancements in technology.

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