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Kawasaki, Japan

Takeo Sato

USPTO Granted Patents = 17

Average Co-Inventor Count = 3.9

ph-index = 9

Forward Citations = 309(Granted Patents)

Location History:

Sagamihara, JP (1987 - 1989)
Kawasaki, JP (1988 - 1997)
Kanagawa, JP (1998)

Company Filing History:

16 out of 27,375

Matsushita Electric Industrial Co., Ltd.

Matsushita Electrical Industrial Co., Ltd.

Years Active: 1987-1998

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17 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 5748288 - Lighting assembly, exposure apparatus and exposure method employing the (1998-05-05),

2. 5621822 - Method of detecting focus position of object from variable gray level (1997-04-15),

3. 5231467 - Reflective alignment position signal producing apparatus (1993-07-27),

4. 5227838 - Exposure system (1993-07-13),

5. 5194744 - Compact reticle/wafer alignment system (1993-03-16),

6. 5155557 - Optical alignment detection apparatus (1992-10-13),

7. 5062705 - Apparatus for evaluating a lens (1991-11-05),

8. 5053628 - Position signal producing apparatus for water alignment (1991-10-01),

9. 5025168 - Alignment apparatus including three beams and three gratings (1991-06-18),

10. 5005938 - Optical wavelength convertical apparatus (1991-04-09),

11. 4948238 - Optical projection system (1990-08-14),

12. 4870289 - Apparatus for controlling relation in position between a photomask and a (1989-09-26),

13. 4861148 - Projection optical system for use in precise copy (1989-08-29),

14. 4844568 - Scanning type projection exposure system (1989-07-04),

15. 4771157 - Electrical discharge machining apparatus for forming minute holes in a (1988-09-13),

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