Takeo Okamoto is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate treatment technology, holding a total of 5 patents. His innovative designs focus on improving the efficiency and throughput of substrate processing systems.

Latest Patents

One of Okamoto's latest patents is a substrate treating apparatus that enhances throughput. This apparatus features an antireflection film forming block, a resist film forming block, and a developing block arranged in juxtaposition. Each block is equipped with chemical treating modules, heat-treating modules, and a single main transport mechanism. This design allows for efficient substrate transport within each block, ensuring that the movement of one block does not interfere with the others. As a result, the overall throughput of the substrate treating apparatus is significantly improved.

Another notable patent is a method and device for transporting semiconductor substrates. In this invention, a robot efficiently manages the transfer of wafers between various processing parts. The robot takes a wafer from an indexer and transports it to a heat processing part while ensuring that excess heat processing is avoided. The cycle time is adjusted to accommodate different lots, allowing for optimized processing times.

Career Highlights

Takeo Okamoto is associated with Dainippon Screen Mfg. Co., Ltd., a company known for its advanced manufacturing technologies. His work has been instrumental in developing innovative solutions that enhance the efficiency of semiconductor processing.

Collaborations

Okamoto has collaborated with notable coworkers, including Yoshiteru Fukutomi and Masami Ohtani. Their combined expertise has contributed to the advancement of substrate treatment technologies.

Conclusion

Takeo Okamoto's contributions to substrate treatment technology exemplify his innovative spirit and dedication to improving manufacturing processes. His patents reflect a commitment to enhancing efficiency in semiconductor processing, making a lasting impact in the field.

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