The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 1989
Filed:
Dec. 11, 1987
Kenichi Terauchi, Hazukashi, JP;
Takeo Okamoto, Hazukashi, JP;
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Abstract
The present invention is directed to a heat treatment apparatus for performing heat treatment of a substrate. According to the present invention, a thermocouple is introduced into a heating furnace and discharged from the heating furnace by carrier means in such a state that one side ends of the wires forming thermocouple are connected to the substrate and another ends of the wires forming the thermocouple are connected to fixed terminals of a terminal mount. Movable terminals of a terminal driving mechanism are brought into contact with the fixed terminals of the terminal mount, to outwardly extract output signals of the thermocouple. Thus, temperatures of the temperature measuring substrate can be accurately measured while securing air-tightness in the heating furnace. Further, entanglement of metal wires forming the thermocouple is prevented in introduction/discharging of the substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile