Company Filing History:
2 out of 1,111 
1 out of 49 
Years Active: 2015-2022
Title: Takehiro Wajiki: Innovator in Substrate Processing Technologies
Introduction
Takehiro Wajiki is a notable inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of 3 patents. His work focuses on improving the efficiency and effectiveness of substrate treatment methods.
Latest Patents
Wajiki's latest patents include a substrate processing apparatus and a substrate processing method. The substrate processing apparatus features a neutralization device that performs neutralization processing on a substrate within a thermal processing section. This device allows for the movement of either the holder that holds the substrate or the emitter that emits vacuum ultraviolet rays, enabling precise irradiation of the substrate's surface. The neutralization processing concludes once the entire surface is irradiated, after which the substrate is transported to a coating processing unit for further treatment.
The substrate treating method involves a nozzle that discharges a processing liquid while a spin chuck holds and rotates the substrate. This method effectively suppresses the formation of minute water droplets by ensuring that the processing liquid converges into a single stream on the substrate. The nozzle's movement towards the outer edge of the substrate while discharging the liquid maintains the flow's integrity, creating a dried region within the processing liquid.
Career Highlights
Wajiki has worked with prominent companies such as Screen Holdings Co., Ltd. and Screen Semiconductor Solutions Co., Ltd. His experience in these organizations has allowed him to refine his skills and contribute to advancements in substrate processing technologies.
Collaborations
Throughout his career, Wajiki has collaborated with talented individuals, including Tadashi Miyagi and Tsuyoshi Mitsuhashi. These collaborations have fostered innovation and the development of new technologies in the field.
Conclusion
Takehiro Wajiki's contributions to substrate processing technologies highlight his innovative spirit and dedication to advancing the industry. His patents and career achievements reflect his expertise and commitment to improving substrate treatment methods.
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