This inventor holds 1 USPTO granted patent. Top assignee: Screen Holdings Co., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Takehiro Sano: Inventor in Substrate Processing Technology.
Introduction
Takehiro Sano is an inventor based in Kyoto, Japan. His patent work concerns substrate processing equipment and methods for detecting abnormalities during processing.
Latest Patents
Sano is associated with 1 patent: “Substrate Processing Apparatus, Abnormality Detection Method and Non-Transitory Computer Readable Medium Storing Abnormality Detection Program.” The invention relates to processing a substrate with a processing liquid using first and second operation components. It acquires an operation value from each component and determines whether an abnormality has occurred based on the correlation between those values.
Career Highlights
Sano is associated with Screen Holdings Co., Ltd. His patent describes an approach to monitoring substrate-processing operations by evaluating relationships between component operation values.
Collaborations
Sano’s listed coworkers include Tetsuya Yamamoto and Yumiko Hirato.
Conclusion
Takehiro Sano’s patent work focuses on detecting abnormalities in substrate-processing apparatus through correlated operation data.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile