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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12638317 B1

PDFFull Text
Date of Patent:
May. 26, 2026

Filed:

Sep. 21, 2022

Substrate processing apparatus, abnormality detection method and non-transitory computer readable medium storing abnormality detection program

Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Tetsuya Yamamoto, Kyoto, JP;

Yumiko Hirato, Kyoto, JP;

Takehiro Sano, Kyoto, JP;

Daiichi Kitagishi, Kyoto, JP;

Assignee:

SCREEN HOLDINGS CO., LTD., , JP;

Attorney:

OSTROLENK FABER LLP

Primary Examiner:

Daniel S Larkin

Int. Cl.
CPC ...
G01D 21/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01D 21/02 (2013.01); H01L 21/67253 (2013.01);
Abstract

In a substrate processing apparatus, a substrate is processed with use of a processing liquid. A first operation component and a second operation component are used in the substrate process. A first operation value of the first operation component and a second operation value of the second operation component are acquired by an operation value acquirer. Whether an abnormality has occurred is determined by an abnormality determiner based on the correlation between the first operation value and the second operation value that are acquired by the operation value acquirer.

Find Patent Forward Citations

Yamamoto, Tetsuya. (2026). Substrate processing apparatus, abnormality detection method and non-transitory computer readable medium storing abnormality detection program (U.S. Patent No. 12638317). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12638317

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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