Company Filing History:
Years Active: 2023-2025
Title: Takayuki Suga: Innovator in Etching Technology
Introduction
Takayuki Suga is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of etching technology, holding a total of 2 patents. His work focuses on methods that enhance the precision and efficiency of etching processes.
Latest Patents
Among his latest innovations is an etching method and apparatus designed for selectively etching materials that contain silicon (Si) and oxygen (O). This method involves placing a substrate with the Si and O material in a chamber. It includes a two-phase process where a basic gas is supplied first, followed by a fluorine-containing gas. Notably, part of the fluorine gas supply period does not overlap with the basic gas supply, allowing for effective heating and removal of reaction products generated during the process.
Career Highlights
Takayuki Suga is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at this organization has allowed him to develop and refine his innovative etching techniques, contributing to advancements in semiconductor technology.
Collaborations
He has collaborated with notable coworkers, including Yoshiki Igarashi and Satoru Kikushima, who have also contributed to the field of etching technology.
Conclusion
Takayuki Suga's contributions to etching technology through his innovative methods and patents have positioned him as a key figure in the semiconductor industry. His work continues to influence advancements in this critical area of technology.