This inventor holds 3 USPTO granted patents. Top assignees: Fujitsu Corporation, Fujitsu Microelectronics Limited. Active years: 2006-2009.
Company Filing History:
Years Active: 2006-2009
Title: Takatoshi Deguchi: Innovator in Semiconductor Manufacturing
Introduction
Takatoshi Deguchi is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 3 patents. His innovative approaches have advanced the technology used in semiconductor devices, particularly in the areas of surface roughness suppression and pattern formation.
Latest Patents
Deguchi's latest patents include a manufacturing method for semiconductor devices aimed at suppressing surface roughness of a Low-k insulating film during etching. This method involves a laminated structure that includes a lower copper wiring layer, a SiC film, and a SiOC film. The process details the etching of the SiOC film to create a via hole and wiring grooves, followed by the etching of the SiC film to form a via hole. The deposited film of etching products plays a crucial role in planarizing the SiOC film surface.
Another notable patent is a method of manufacturing semiconductor devices that includes forming a laminated film for pattern formation on a substrate. This laminated film consists of an innermost layer, an inner layer, and a surface layer, with specific extinction coefficients that enhance the pattern formation process.
Career Highlights
Throughout his career, Takatoshi Deguchi has worked with notable companies such as Fujitsu Corporation and Fujitsu Microelectronics Limited. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.
Collaborations
Deguchi has collaborated with esteemed colleagues, including Akihiko Otoguro and Satoshi Takechi. Their combined expertise has fostered innovation and development in the semiconductor field.
Conclusion
Takatoshi Deguchi's contributions to semiconductor manufacturing highlight his role as a key innovator in the industry. His patents reflect a commitment to advancing technology and improving manufacturing processes.