Kyoto, Japan

Takashi Nagao


Average Co-Inventor Count = 11.2

ph-index = 2

Forward Citations = 69(Granted Patents)


Company Filing History:


Years Active: 2003-2006

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3 patents (USPTO):Explore Patents

Title: Takashi Nagao: Innovator in Substrate Treatment Technology

Introduction

Takashi Nagao is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate treatment technology, holding three patents that showcase his innovative approach to improving efficiency in this area.

Latest Patents

One of his latest patents is a substrate treating method and apparatus designed to eliminate wasteful consumption of treating solutions. This apparatus delivers the treating solution in a strip form to a substrate from a nozzle that sweeps over the surface. The invention includes collecting vessels arranged around a developing cup that surrounds a wafer, allowing for the collection of developer delivered from a discharge opening. Another aspect of his invention involves collecting vessels positioned below the developer delivery nozzle, which are moved longitudinally according to the nozzle's position relative to the wafer.

Additionally, he has developed a substrate treating apparatus and method that features a series of substrate transport paths arranged on upper and lower stories. This design allows for efficient transfer of substrates between the two levels, minimizing waiting times caused by interference between substrates moving in different directions.

Career Highlights

Takashi Nagao is associated with Dainippon Screen Mfg. Co., Ltd., a company known for its advancements in manufacturing technology. His work has significantly impacted the efficiency of substrate treatment processes, making him a valuable asset to the company.

Collaborations

Throughout his career, Takashi has collaborated with notable coworkers such as Masakazu Sanada and Minobu Matsunaga. Their combined expertise has contributed to the development of innovative solutions in substrate treatment technology.

Conclusion

Takashi Nagao's contributions to substrate treatment technology through his patents and collaborations highlight his role as an influential inventor in the field. His work continues to pave the way for advancements in manufacturing processes.

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