Takanobu Hori

Title: The Innovative Work of Takanobu Hori

Introduction

Takanobu Hori, an accomplished inventor based in Hyogo, Japan, has made significant contributions to the field of magnetron sputtering technology. With three patents to his name, Hori's inventions focus on enhancing the efficiency and precision of film deposition processes in various applications.

Latest Patents

Hori's recent patents include groundbreaking innovations such as the "Magnet Structure and Cathode Electrode Unit for Magnetron Sputtering" and the "Magnetron Sputtering System." The first patent provides a novel magnet structure designed to effectively produce a tunnel-shaped leakage magnetic field for plasma confinement. It features a quadridirectional magnetic field through the interaction of multiple magnets, allowing for a well-balanced magnetic force across the target's surface. Specifically, this invention incorporates inner and outer magnets with differing magnetic moment orientations, along with intermediate magnets to cancel out unwanted magnetic flux density components. Additionally, a magnetic member guides the magnetic force line between the intermediate magnets to ensure optimal performance.

Hori's second patent, the film deposition method, offers a novel technique for depositing a halogen compound film. This method efficiently incorporates halogen ions into the deposited film while minimizing deficiencies, allowing for high-quality film creation. The process involves the evaporation of a halogen compound, ionizing the material using radio frequency power, and ensuring proper deposition onto the substrate through careful voltage application.

Career Highlights

Throughout his career, Takanobu Hori has worked with prestigious companies, including Shinmaywa Industries, Ltd., and Hitachi, Ltd. His experience in these organizations has undoubtedly contributed to his innovative mindset and technical prowess in developing cutting-edge technologies in the sector of sputtering and film deposition.

Collaborations

Hori has had the pleasure of collaborating with esteemed professionals such as Hiroshi Kajiyama and Akira Kato. Working alongside these talented individuals has allowed Hori to further refine his inventions and expand his contributions to the field.

Conclusion

Takanobu Hori's inventive spirit and professional journey highlight the importance of collaboration and innovation in technological advancement. His contributions to magnetron sputtering technology and film deposition processes continue to leave a lasting impact on the industry, paving the way for future developments and enhancements in various applications.