Miyagi, Japan

Takaki Kobune


Average Co-Inventor Count = 1.4

ph-index = 1


Company Filing History:


Years Active: 2024-2025

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4 patents (USPTO):

Title: Takaki Kobune: Innovator in Plasma Processing Technology

Introduction

Takaki Kobune is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 4 patents. His innovative work has advanced the capabilities of plasma processing apparatuses, making them more efficient and effective.

Latest Patents

One of his latest patents is the Upper Electrode Assembly, which is designed for use in a plasma processing apparatus. This assembly includes an electrode plate, a metal plate, and a heat transfer sheet positioned between them. The heat transfer sheet features a vertically oriented portion that contains multiple vertically oriented graphene structures, enhancing the performance of the assembly. Another notable patent is the Plasma Processing Apparatus itself, which consists of a cylindrical chamber that defines a processing space for substrate treatment. This apparatus includes a member that forms the outer circumference of the chamber, featuring flow path inlets and outlets for a heat transfer medium, designed to optimize the processing environment.

Career Highlights

Takaki Kobune is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has allowed him to collaborate with other talented professionals in the field, furthering the development of innovative technologies.

Collaborations

Some of his notable coworkers include Lifu Li and Hiroshi Tsujimoto, who have also contributed to advancements in plasma processing technology. Their collaborative efforts have led to significant improvements in the efficiency and effectiveness of plasma processing systems.

Conclusion

Takaki Kobune's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor in the field. His innovative designs continue to shape the future of plasma processing applications.

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