Hyogo, Japan

Takahiro Yokoi


Average Co-Inventor Count = 3.3

ph-index = 3

Forward Citations = 28(Granted Patents)


Company Filing History:


Years Active: 1998-2002

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3 patents (USPTO):Explore Patents

Title: Takahiro Yokoi: Innovator in Semiconductor Technology

Introduction

Takahiro Yokoi is a prominent inventor based in Hyogo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving the manufacturing processes and efficiency of semiconductor devices.

Latest Patents

Yokoi's latest patents include innovative methods for semiconductor device manufacturing. One of his notable inventions is a semiconductor device and manufacturing method that involves forming a silicon oxide film to cover a polysilicon plug. A bowing shaped hole is created, and a barrier metal along with a metal film is formed, which undergoes prescribed anisotropic etching. This method addresses the RIE-lag effect, ensuring that the etch rate of the barrier metal is controlled, thus preventing the exposure of the polysilicon plug's surface. This results in a semiconductor device that guarantees a reliable electrical connection of metal interconnections. Another significant patent is a method of manufacturing a semiconductor device that includes forming an interconnection layer in a floating state and an interlayer insulating film on a semiconductor substrate. A connection hole is created by dry etching, and a conductive member is filled in the hole, ensuring reduced contact resistance even for extremely small contact holes.

Career Highlights

Takahiro Yokoi is currently employed at Mitsubishi Electric Corporation, where he continues to advance semiconductor technology. His expertise and innovative approaches have positioned him as a key figure in the industry.

Collaborations

Yokoi has collaborated with notable colleagues, including Yoshikazu Ohno and Hiroki Shinkawata, contributing to various projects and advancements in semiconductor technology.

Conclusion

Takahiro Yokoi's contributions to semiconductor technology through his patents and innovative methods have made a significant impact in the field. His work continues to influence the development of efficient and reliable semiconductor devices.

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