The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2000
Filed:
Apr. 10, 1998
Applicant:
Inventors:
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438738 ; 438740 ; 438743 ; 438744 ;
Abstract
An interconnection layer 3 in a floating state and an interlayer insulating film 6 are formed on a semiconductor substrate. A connection hole 4 penetrating the interlayer insulating film and the interconnection layer is formed by dry etching with fluorocarbon. Filled in the connection hole is a conductive member 5 which is electrically connected to the interconnection layer. Accordingly, an improved method for manufacturing a semiconductor device offering a reduced contact resistance even for an extremely small contact hole is obtained.